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US 12,572,164 B2Granted
Dual model-based temperature controller
AssigneeASM IP Holding B.V.
InventorsLiu Zhenduo, Theodorus G.M. Oosterlaken
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Abstract
Temperature control systems and methods for a thermal reactor having a process chamber, the control system comprising a first control loop comprising a first Model-Based Predictive Controller (MBPC) and a second control loop comprising a second MBPC, wherein the first and second MBPC are provided with predictive models representing the behavior of the thermal reactor.
Claims15
A temperature control system for a thermal reactor having a process chamber, the temperature control system comprising:
- a first control loop comprising a first Model-Based Predictive Controller (MBPC), which uses a spike temperature sensor signal from a spike temperature sensor as input, and which provides a power output signal that controls power to a heating element of the thermal reactor, the spike temperature sensor being located in proximity to the heating element and spaced from the process chamber,
- wherein the first MBPC is provided with a first predictive model representing behavior of the thermal reactor, the first MBPC being configured to calculate a first output value based on first calculations over a first predictive time horizon, using the first predictive model, said first output value controlling the power output signal;
- and
- a second control loop comprising a second MBPC, which uses a paddle temperature sensor signal from a paddle temperature sensor and the spike temperature sensor signal as inputs, and which provides as a spike temperature control setpoint that is used as input for the first MBPC, the paddle temperature sensor being spaced from the heating element and located inside or in proximity to the process chamber,
- wherein the second MBPC is provided with a second predictive model representing the behavior of the thermal reactor, the second MBPC being configured to calculate a second output value based on second calculations over a second predictive time horizon, using the second predictive model, the second output value controlling the spike temperature control setpoint.
2 more elements
A control system comprising:
- a first control loop comprising a first Model-Based Predictive Controller (MBPC) for controlling a plant with an output signal that controls power to a heating element in a process chamber of said plant, wherein said first MBPC is configured to receive first sensor data from at least one spike temperature sensor located in proximity to the heating element and spaced from the process chamber, and said output signal is based at least in part on first calculations in said first MBPC over a first predictive time horizon;
- and
- a second control loop comprising a second MBPC, wherein said second MBPC is configured to provide a control setpoint to said first MBPC, said control setpoint is based on second calculations in said second MBPC over a second predictive time horizon, and said second MBPC is further configured to receive second sensor data from:
- (1) at least one paddle temperature sensor located inside or in proximity to the process chamber and spaced from the heating element;
- and
- (2) the at least one spike temperature sensor.
3 more elements
A method for controlling a plant having a process chamber, comprising:
- providing control inputs to said plant from a first control loop, said first control loop comprising a first Model-Based Predictive Controller (MBPC) configured to receive first sensor data from at least one spike temperature sensor located in proximity to a heating element and spaced from the process chamber, and said control inputs being based at least in part on first calculations in said first MBPC over a first predictive time horizon;
- and
- providing a control setpoint to said first control loop, said control setpoint being computed by a second control loop comprising a second MBPC configured to receive second sensor data from:
- (1) at least one paddle temperature sensor located inside or in proximity to the process chamber and spaced from the heating element;
- and
- (2) the at least one spike temperature sensor;
- said second MBPC further being configured to receive a control process sequence for said plant, and said second MBPC being configured to calculate said control setpoint based on second calculations in said second MBPC over a second predictive time horizon.
4 more elements
Dependencies are inferred from the claim text.