Inspection system and inspection method
AssigneesTsinghua University, Nuctech Company Limited
InventorsZhiqiang Chen, Li Zhang, Qingping Huang, Yong Zhou, Hui Ding, Xin Jin, Chao Ji
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AssigneesTsinghua University, Nuctech Company Limited
InventorsZhiqiang Chen, Li Zhang, Qingping Huang, Yong Zhou, Hui Ding, Xin Jin, Chao Ji
Estimating the term…
Provided are an inspection method, and an inspection system including: at least one ray source; a detector assembly and a conveying device. At least one ray source and the detector assembly may move in a traveling direction relative to the conveying device, so that the to-be-inspected object may enter an inspection region. When viewed along a central axis of the inspection region, at least one ray source may translate between scanning positions, and a translation distance of at least one ray source between two adjacent scanning positions is greater than a spacing between adjacent target spots of each ray source. When at least one ray source is located at one scanning position, at least one ray source and the detector assembly move in the traveling direction and at least one ray source emits X-rays. After moving a predetermined distance, at least one ray source translates to another scanning position.
An inspection system, comprising:
An inspection method, comprising the following steps:
Dependencies are inferred from the claim text.