Method of inspecting temperature controlling system
AssigneeSemes Co., Ltd.
InventorsChungwoo Lee, Yunsik Ju
Life of this patent
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Abstract
A method of inspecting a temperature controlling system is provided. The method includes generating a measurement matrix based on current measurement values of the temperature controlling system, calculating a transformation matrix having the same dimensions as the measurement matrix based on the measurement matrix, calculating an auxiliary matrix having the same dimensions as the measurement matrix based on the transformation matrix, and calculating a defect matrix representing defective diodes among the plurality of diodes, based on a difference operation between the auxiliary matrix and the transformation matrix.
Claims20
A method of inspecting a temperature controlling system including a plurality of heaters and a plurality of diodes arranged in a matrix, the method comprising:
- generating a measurement matrix based on current measurement values of the temperature controlling system;
- calculating a transformation matrix having the same dimensions as the measurement matrix, based on the measurement matrix;
- calculating an auxiliary matrix having the same dimensions as the measurement matrix, based on the transformation matrix;
- and
- calculating a defect matrix representing defective diodes among the plurality of diodes, based on a difference operation between the auxiliary matrix and the transformation matrix,
- wherein each of components of the measurement matrix and each of components of the transformation matrix are dependent on the number of defective diodes connected to a diode corresponding to component of matrix among the plurality of diodes.
A method of inspecting a temperature controlling system including a plurality of row buses, a plurality of row switching elements respectively connected to the plurality of row buses, a plurality of column buses, a plurality of column switching elements respectively connected to the plurality of column buses, a plurality of heaters connected to the plurality of row buses, and a plurality of diodes respectively connected to the plurality of heaters and respectively connected to the plurality of column buses, the method comprising:
- determining a measurement matrix by detecting currents output through the plurality of column buses after one row switching element selected from among the plurality of row switching elements is turned on and one column switching element selected from among the plurality of column switching elements is turned off;
- calculating a transformation matrix based on the measurement matrix;
- calculating an auxiliary matrix based on the transformation matrix;
- and
- calculating a defect matrix representing defective diodes among the plurality of diodes based on the auxiliary matrix and the transformation matrix,
- wherein the transformation matrix is determined according to an equation below,
- Tij
- =
- α
- *
- Kij
- 1
- -
- Kij
- where Tij is a (i,j) component of the transformation matrix, Kij is a (i,j) component of the measurement matrix, and α is determined based on a number of the plurality of column buses and a number of the plurality of row buses.
A method of inspecting a temperature controlling system including a plurality of row buses, a plurality of row switching elements respectively connected to the plurality of row buses, a plurality of column buses, a plurality of column switching elements respectively connected to the plurality of column buses, a plurality of heaters connected to the plurality of row buses, and a plurality of diodes respectively connected to the plurality of heaters and respectively connected to the plurality of column buses, the method comprising:
- calculating each of components of a transformation matrix which is the same as the number of defective diodes connected to a column bus to which a diode corresponding to each of the components of the transformation matrix among the plurality of diodes is connected among the plurality of column buses;
- calculating an auxiliary matrix based on the transformation matrix;
- and
- calculating a defect matrix representing defective diodes among the plurality of diodes, based on an operation between the auxiliary matrix and the transformation matrix,
- wherein each of components of the auxiliary matrix is the same as a greatest value among values of the components included in the same column of the transformation matrix.
Dependencies are inferred from the claim text.