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US 12,571,776 B2Granted
Sensors, methods of making and devices
AssigneeZomedica Biotechnologies LLC
InventorsJames Russell Webster, Peter J. Schiller, Richard Allan Van Deusen, Ian Robert Harmon
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Abstract
Disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be formed in association with the resonators. The at least one resonator in embodiments can include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode.
Claims11
A method of forming a sensor, comprising:
- forming a first acoustic resonator, the first resonator comprising a first surface and an opposing second surface, and wherein the first resonator comprises:
- a bottom electrode;
- a piezoelectric layer on at least a portion of the bottom electrode;
- and
- a top electrode on at least a portion of the piezoelectric layer;
- and
- depositing a metal oxide layer on the second surface of the first resonator, and forming a coupling layer comprising silane on the metal oxide layer;
- depositing a molecular recognition component on the coupling layer;
- forming a second acoustic resonator aligned with the first resonator;
- and
- positioning a Bragg reflector stack beneath the first and second resonators, and connecting the first and second resonators in series to diminish parasitic resonances of the Bragg reflector stack.
8 more elements
Dependencies are inferred from the claim text.