A control system for automatedly determining an illumination intensity of at least one light source of a fluorescence microscope, the at least one light source used for stimulating at least one fluorophore in a sample, the at least one light source being configured to vary the illumination intensity, and the microscope having at least one detector used for detecting an image intensity of the sample, the control system configured to:
- automatedly determine, after a change in a light path, a control value for the illumination intensity of the at least one light source, in order to achieve a desired value of an inspection parameter characterizing sample inspection, whereby the light path comprises at least one of:
- an illumination path from the at least one light source to the sample and an imaging path from the sample to the at least one detector,
- wherein determining the control value for the illumination intensity of the at least one light source is based on:
- (i) a value of the illumination intensity that was set before the change in the light path, (ii) a value of the inspection parameter used before the change in the light path, and (iii) a physical model of the light path, the physical model mapping the illumination intensity of the at least one light source to the inspection parameter, taking into account imaging characteristics of optical components in the light path, and
- wherein the control system is further configured to determine a final control value for the illumination intensity, at which the desired value of the inspection parameter is achieved, based on an iterative method, wherein the control value determined based on the physical model is used as a starting value in the iterative method.