Apparatus comprising infrared cameras and a temperature source and method for detecting cracks in samples by infrared radiation
AssigneeInfineon Technologies AG
InventorsCharles Rimbert-Riviere, Simon Kornprobst, Soumya Susovita Nayak, Ernst-Roland Sittner
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Abstract
An apparatus for detecting cracks in a plurality of samples includes: a temperature source configured to heat or cool a section of the samples; one or more infrared cameras positioned near one or both sides of the samples and configured to receive infrared image data from the samples; a data acquisition and processing unit configured to generate a two-dimensional image out of the infrared image data to detect cracks in the samples; and a conveyor unit configured to transport the samples past the temperature source and the one or more infrared cameras.
Claims10
A method of detecting cracks in a plurality of samples, the method comprising:
- heating or cooling a section of the plurality of samples;
- collecting infrared image data from the plurality of samples;
- and
- transporting each sample of the plurality of samples before heating or cooling the section of the plurality of samples and after collecting the infrared image data from the plurality of samples,
- wherein the heating or the cooling the section of the plurality of samples is performed by bringing a hot plate or a cold plate in a direct contact with the plurality of samples.
A method of detecting cracks in a plurality of samples, the method comprising:
- heating or cooling the plurality of samples by placing the plurality of samples in an oven or a chiller;
- removing the plurality of samples from the oven or the chiller;
- collecting infrared image data from the plurality of samples;
- and
- generating a two-dimensional image out of the infrared image data to detect cracks in the plurality of samples,
- wherein each sample of the plurality of samples is a ceramic substrate, and
- wherein the ceramic substrate is sintered in the oven during the heating the plurality of samples and before the collecting the infrared data from the plurality of samples.
Dependencies are inferred from the claim text.