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US 12,571,692 B2Granted
Lithographic strain gauge in an electrically conducting substrate
AssigneeMicrosoft Technology Licensing, LLC
InventorsLuke Thomas Gregory, Rick Chun Kit Cheung
Life of this patent
Estimating the term…
Abstract
An electrically conducting substrate includes a plurality of layers. A strain gauge is deposited on a layer of the plurality of layers. The strain gauge measures the stress and/or strain of the electrically conducting substrate. This allows the strain gauge to determine whether a stress or strain of the electrically conducting substrate has caused the electrically conducting substrate to deform, crack, or break.
Claims20
An electronic circuit, comprising:
- an electrically conductive substrate comprising:
- a first electrically conductive layer;
- a second electrically conductive layer;
- and
- a strain gauge located inside the electrically conductive substrate and extending across the first electrically conductive layer and the second electrically conductive layer at a transverse angle to the first electrically conductive layer and to the second electrically conductive layer, wherein the strain gauge is configured to measure strain within an interior of the electrically conductive substrate.
2 more elements
A computing device, comprising:
- an electrically conductive substrate, the electrically conductive substrate including:
- an electrically conductive bottom layer;
- an electrically conductive top layer;
- a first electrically conductive layer positioned between the electrically conductive bottom layer and the electrically conductive top layer;
- a second electrically conductive layer positioned between the electrically conductive bottom layer and the electrically conductive top layer;
- and
- a strain gauge located inside the electrically conductive substrate between the electrically conductive bottom layer and the electrically conductive top layer and extending across the first electrically conductive layer and the second electrically conductive layer at a transverse angle to the first electrically conductive layer and to the second electrically conductive layer the strain gauge being configured to measure a strain of the electrically conductive substrate.
4 more elements
A method for manufacturing an electrically conductive substrate, comprising:
- depositing a first layer of an electrically conducting substrate;
- depositing a first portion of a strain gauge in the first layer of the electrically conducting substrate;
- depositing a second layer of the electrically conducting substrate on top of the first layer of the electrically conductive substrate and on top of the first portion of the strain gauge;
- and
- depositing a second portion of the strain gauge in the second layer of the electrically conducting substrate only partially overlapping the first portion of the strain gauge such that the strain gauge extends across the first layer and the second layer at a transverse angle to the first layer and to the second layer.
2 more elements
Dependencies are inferred from the claim text.