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US 12,571,628 B2Granted
Optical test device
AssigneeJENOPTIK Industrial Metrology Germany GmbH
InventorOtto Boucky
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Abstract
An optical test device for testing flat test objects comprises a holder for the test object and two optical sensors for detecting the three-dimensional surface topography of the test object. According to the invention, the holder is formed at least in sections as a test standard and is disposed with respect to the sensors in such a way that the sensors scan the test object from opposite sides and also detect the holder as a test standard at least in sections during the detecting of the test object.
Claims18
An optical test device for testing flat test objects, comprising:
- a holder for the test object and
- at least two optical sensors for detecting the three-dimensional surface topography of the test object, wherein:
- the holder is formed at least in sections as test standard and is disposed relative to the sensors in such a way that the sensors scan the test object from opposite sides and, during the detecting of the test object, also detect the holder as test standard at least in sections,
- the holder comprises two plate-shaped individual parts, each with a window-shaped recess for the receiving of the test object in a reference plane, which are formed as test standard surfaces at their mutually facing surfaces, and
- the individual parts are connected to each other in the reference plane offset relative to each other in such a way that test normal surfaces of the one individual part can be or are scanned by one of the sensors through the recess in the other individual part.
2 more elements
Dependencies are inferred from the claim text.