Crucible lifting device
AssigneeKenmec Mechanical Engineering Co., Ltd.
InventorsShih-Chen Chang, Chih-Chun Ko
Life of this patent
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AssigneeKenmec Mechanical Engineering Co., Ltd.
InventorsShih-Chen Chang, Chih-Chun Ko
Estimating the term…
A crucible lifting device includes a vacuum chamber, a vacuum chamber lower seat and a crucible lifting assembly. The vacuum chamber lower seat is arranged orthogonally at the bottom of the vacuum chamber, the vacuum chamber lower seat including a plurality of coupling parts arranged orthogonally at the vacuum chamber lower seat and on a side away from the vacuum chamber. The crucible lifting assembly is arranged on the vacuum chamber lower seat and on the side away from the vacuum chamber. The crucible lifting assembly includes a plurality of multi-rotation angle guides, one end of each multi-rotation angle guide connected to each coupling part; a plurality of guide rods, one end of each guide rod connected to the other end of each multi-rotation angle guide; and a plurality of guide rod accommodating parts, each guide rod accommodating part configured to correspond to each guide rod.
A crucible lifting device, comprising:
Dependencies are inferred from the claim text.