Single-crystal diamond, method of manufacturing the same, and method of manufacturing single-crystal diamond plate
AssigneeSumitomo Electric Industries, Ltd.
InventorsHitoshi Sumiya, Yoshiki Nishibayashi, Yikang Zuo, Jin Hwa Lee, Minori Teramoto, Yutaka Kobayashi
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Abstract
A single-crystal diamond, wherein the single-crystal diamond has a nitrogen content based on the number of atoms of more than 0.1 ppm and 50 ppm or less, the single-crystal diamond has a boron content based on the number of atoms of 0.1 ppm or less, the single-crystal diamond has an average of a phase difference per unit thickness of 20 nm/mm or less, and the phase difference has a standard deviation of 10 nm/mm or less.
Claims10
A single-crystal diamond, wherein
- the single-crystal diamond has a nitrogen content based on the number of atoms of more than 0.1 ppm and 50 ppm or less,
- the single-crystal diamond has a boron content based on the number of atoms of 0.1 ppm or less,
- the single-crystal diamond has an average of a phase difference per unit thickness of 20 nm/mm or less, and
- the phase difference has a standard deviation of 10 nm/mm or less.
A method of manufacturing a single-crystal diamond plate having a (111) plane as a main surface, the method comprising:
- a 1A step of preparing a single-crystal diamond material with an average of a phase difference per unit thickness of more than 20 nm/mm and 50 nm/mm or less and a standard deviation of the phase difference of more than 10 nm/mm and 20 nm/mm or less;
- a 2A step of cutting out a diamond seed crystal having (111) as a main surface from the single-crystal diamond material to manufacture a {111} diamond seed crystal;
- a 3A step of growing a diamond crystal on the {111} diamond seed crystal by a temperature difference method to manufacture a single-crystal diamond;
- and
- a 4A step of cutting out a plate from a {100} sector of the single-crystal diamond to manufacture the single-crystal diamond plate having the (111) plane as a main surface.
Dependencies are inferred from the claim text.