Nanocomposite coating material for rollers of secondary battery electrode manufacturing equipment and manufacturing system thereof

A coating material applied to a roller in secondary battery electrode manufacturing equipment, comprising:

• a buffer layer sequentially including a Cr layer, a CrN layer, a CrN2 layer, and a CrCH layer;
• and
• a ternary nanocomposite coating layer of C—F—Si formed on the buffer layer,
• wherein the ternary nanocomposite coating layer is formed by supplying reducing hydrogen in addition to C, F, and Si components during the formation process, wherein the coating layer is a gradient coating layer comprising a higher concentration of the F component toward the surface, wherein the coating material has a contact angle of 90° or more, and has a high hardness characteristic of 17 to 27 GPa.

A manufacturing system for a ternary nanocomposite coating material comprising C—F—H, or C—F—Si, applied to a roller used in secondary battery electrode manufacturing equipment, comprising:

• a large chamber into which a roller is loaded;
• an ion source applied to said chamber;
• a cylinder sputter source including a Cr target to form a Cr-based buffer layer prior to coating the ternary nanocomposite coating on the surface of the roller;
• a raw material supply unit for feeding said ion source with C, F, and H, or C, F, and Si, respectively, as raw materials;
• and
• a power supply unit;
• wherein the power supply unit applies a bias voltage of 50 to 500 volts to the roller to attract the generated plasma and electrons toward the roller,
• wherein the ion source includes permanent magnets or electromagnets arranged to generate high-density plasma,
• wherein the cylindrical sputtering source is utilized to form a buffer layer on the roller used in secondary battery electrode manufacturing equipment, comprising, in order, a Cr layer, a CrN layer, a CrN2 layer, and a CrCH layer,
• wherein a ternary nanocomposite coating layer of C—F—H is formed on the buffer layer by supplying hydrocarbon gas, CF4, and reducing hydrogen (H2) to the ion source as raw materials,
• or a ternary nanocomposite coating layer of C—F—Si is formed on the buffer layer by supplying hydrocarbon gas, CF4, reducing hydrogen (H2), and at least one of TMS (Tetramethylsilane), SiH4, Si2H6, or SiH2Cl2 as Si sources to the ion source,
• and the nanocomposite coating layer is formed as a gradient coating layer comprising more of the F component toward the surface.