Composition for semiconductor processing and processing method

Abstract

A composition for semiconductor processing according to the disclosure contains (A) a compound represented by the following general formula (1), (B) a compound represented by the following general formula (2), (C) a compound having at least one functional group selected from the group consisting of an amino group and a salt thereof and a hydroxyl group (excluding the compound represented by the following general formula (1), a compound having a carboxyl group and a nitrogen-containing heterocyclic compound) and (D) a liquid medium, and, when the content of the (A) component is indicated by MA [mass %] and the content of the (B) component is indicated by MB [mass %], MA/MB is 1.0×102 to 1.0×104. R2N(OH)  (1) R2NH  (2) (In the formula (1) and the formula (2), R's each independently represent an alkyl group having 1 to 4 carbon atoms).

Dependencies are inferred from the claim text.