Micromechanical component for a sensor and/or microphone device
AssigneeRobert Bosch GmbH
InventorsHeribert Weber, Peter Schmollngruber
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AssigneeRobert Bosch GmbH
InventorsHeribert Weber, Peter Schmollngruber
Estimating the term…
A micromechanical component for a sensor and/or microphone device. The component has an adjustable first actuator electrode suspended on a regionally deformable first layer, a first stator electrode fastened so that a first measuring signal is able to be tapped with regard to a first voltage or capacitance applied between the first actuator electrode and the first stator electrode, and a second actuator electrode, so that a second measuring signal is able to be tapped with regard to a second voltage or capacitance applied between the second actuator electrode and the first stator electrode or between the second actuator electrode and the second stator electrode. The second actuator electrode is situated in an adjustable manner on a side of the first actuator electrode facing away from the first layer in that the second actuator electrode is suspended on the first actuator electrode and/or an at least regionally deformable second layer.
A micromechanical component for a sensor and/or microphone device, comprising:
A production method for a micromechanical component for a sensor and/or microphone device, comprising the following steps:
Dependencies are inferred from the claim text.