Path generation device, path generation method, and path generation program

A path generation method for generating a path of a mover, the method comprising:

• setting an object model as a model of an object included in a layout space where the mover is located:
• setting a device model as a model of the mover in the layout space, at least one of the object model or the device model is a point group model formed of point groups;
• generating a path of the mover stepwise;
• and
• performing interference determination on the object model and the device model after having moved along the path, based on a distance between the object model and the device model, by:
• determining whether an inter-model distance, which is a minimum distance between a first object model with a first density and a first device model with the first density, is less than or equal to a first safety threshold;
• when the inter-model distance is larger than the first safety threshold, determining that there is no possibility of interference;
• when the inter-model distance is less than or equal to the first safety threshold, determining whether the inter-model distance is less than or equal to an interference threshold smaller than the first safety threshold;
• when the inter-model distance is less than or equal to the interference threshold, determining that there is interference and generating a different path;
• and
• when the inter-model distance is between the first safety threshold and the interference threshold, determining that there is a possibility of interference, increasing the density of the point groups of the first object model to a second density to form a second object model, and performing the interference determination again by determining whether an inter-model distance between the second object model and a second device model with the second density is less than or equal to a second safety threshold smaller than the first safety threshold.

A non-transitory computer readable medium having computer-executable instructions stored thereon, which when executed by a processor, cause the processor to perform a method comprising:

• setting an object model as a model of an object included in a layout space where the mover is located;
• setting a device model as a model of the mover in the layout space, at least one of the object model or the device model is a point group model formed of point groups;
• generating a path of the mover stepwise;
• and
• performing interference determination on the object model and the device model after having moved along the path, based on a distance between the object model and the device model, by:
• determining whether an inter-model distance, which is a minimum distance between a first object model with a first density and a first device model with the first density, is less than or equal to a first safety threshold;
• if the inter-model distance is larger than the first safety threshold, determining that there is no possibility of interference;
• if the inter-model distance is less than or equal to the first safety threshold, determining whether the inter-model distance is less than or equal to an interference threshold smaller than the first safety threshold;
• if the inter-model distance is less than or equal to the interference threshold, determining that there is interference and generating a different path;
• if the inter-model distance is between the first safety threshold and the interference threshold, determining that there is a possibility of interference, increasing the density of the point groups of the first object model to a second density to form a second object model, and performing the interference determination again by determining whether an inter-model distance between the second object model and a second device model with the second density is less than or equal to a second safety threshold smaller than the first safety threshold.