Polishing apparatus, polishing method, and cleaning liquid supply device
AssigneeMeinan Machinery Works, Inc.
InventorYasumasa Hasegawa
Life of this patent
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AssigneeMeinan Machinery Works, Inc.
InventorYasumasa Hasegawa
Estimating the term…
Cleaning water CW is supplied to the outer surface of a draining roll 10 from a pipe 70 arranged above the draining roll 10 that is in pressure contact with a contact roll 8 via a polishing belt PB. Accordingly, the cleaning water CW adheres evenly to the outer surface of the draining roll 10 in the longitudinal direction along with the rotation of the draining roll 10. Then, the cleaning water CW sufficiently adhering to the outer peripheral surface of the draining roll 10 is carried to a contact portion 90 between the draining roll 10 and the polishing belt PB, and cleans the abrasive surface of the polishing belt PB. As a result, it is possible to well reduce the occurrence of uneven cleaning on the abrasive surface, and to further improve the polishing effects of a polishing apparatus 1.
A polishing apparatus for polishing a processed material by rotating an endless abrasive belt having an abrasive surface, the polishing apparatus comprising:
A polishing method for polishing a processed material by rotating an endless abrasive belt having an abrasive surface, the polishing method comprising:
Dependencies are inferred from the claim text.