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US 12,568,849 B2Granted
Dam for three-dimensional integrated circuit
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsung-Ding Wang, An-Jhih Su, Chien Ling Hwang, Jung Wei Cheng, Hsin-Yu Pan, Chen-Hua Yu
Life of this patent
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Abstract
An apparatus comprising a first substrate, a dam structure disposed on a first side of the first substrate, and an integrated circuit (IC) memory chip coupled to the first side of the first substrate by a plurality of first conductive members. A second substrate is coupled to a second side of the first substrate by a plurality of second conductive members. A lid coupled to the second substrate encloses the IC memory chip and the first substrate. A thermal interface material (TIM) is coupled between the lid and the dam structure.
Claims19
A structure comprising:
- a first chip bonded to a first side of a first substrate by a first plurality of conductive connectors;
- a dam structure on the first side of the first substrate, the dam structure being spaced apart from the first plurality of conductive connectors, the dam structure being a single, continuous structure around the first chip, the dam structure having a first sidewall, a second sidewall, and a top surface extending from the first sidewall to the second sidewall;
- a second substrate bonded to a second side of the first substrate, the second side being opposite the first side;
- a first underfill between the first and second substrates;
- a second underfill between the first chip and the first substrate, the second underfill between and surrounding the first plurality of conductive connectors;
- and
- a lid attached to the second substrate, the dam structure, and the first chip, the lid being attached to the first chip by a first thermal interface material (TIM) and to the dam structure by a second TIM, the lid having a first bottom surface, a first inner surface, a second bottom surface, a second inner surface, and a third bottom surface, each of the first, second, and third bottom surfaces being a different distance from the second substrate, the first bottom surface contacting the first TIM, the second bottom surface contacting the second TIM, and the third bottom surface contacting an adhesive member on the second substrate, the first inner surface extending from the first bottom surface to the second bottom surface, the second inner surface extending from the second bottom surface to the third bottom surface, the first and second inner surfaces being perpendicular to the first bottom surface, the second TIM physically contacting the first sidewall, the top surface, and the second sidewall of the dam structure and the first side of the first substrate, an air gap being between the second TIM and the first TIM;
- wherein:
- the dam structure is a different material than the first substrate,
- the second TIM extends from the lid to the dam structure,
- the first TIM extends from the lid to the first chip, and
- the second TIM has a sidewall coterminous with a sidewall of the first substrate.
9 more elements
A structure comprising:
- a dam structure disposed on a first side of a first substrate, each structure of the dam structure having a first thickness, an outermost sidewall of the dam structure being spaced apart from a sidewall of the first substrate by a first distance, the first distance being a same value as the first thickness;
- an integrated circuit (IC) chip coupled to the first side of the first substrate by a plurality of first conductive members, the dam structure being spaced apart from the IC chip;
- a second substrate coupled to a second side of the first substrate by a plurality of second conductive members;
- and
- a lid coupled to the second substrate by an adhesive member, the lid further coupled to the dam structure by a first thermal interface material (TIM) and the IC chip by a second TIM, the first TIM extending along and physically contacting two sidewalls of the dam structure and having a sidewall coterminous with the sidewall of the first substrate, the first TIM physically contacting the first side of the first substrate, the first TIM being spaced apart from the IC chip and the second TIM, the lid being a continuous material from the adhesive member on the second substrate to the first and second TIMs on the dam structure and the IC chip, a first air gap separating the sidewall of the first substrate from a first sidewall of the lid, a second air gap separating a sidewall of the IC chip from a second sidewall of the lid.
2 more elements
A structure comprising:
- a first chip bonded to a first side of a first substrate with a first plurality of conductive members;
- a first underfill between the first chip and the first side of the first substrate and surrounding each of the first plurality of conductive members;
- a dam structure on the first side of the first substrate, the dam structure comprising multiple members on the first side of the first substrate, each of the multiple members continuously surrounding the first plurality of conductive members, and each of the multiple members being laterally outside of outer sidewalls of the first chip, each member of the dam structure having a first thickness, an outermost sidewall of the dam structure being spaced apart from a sidewall of the first substrate by a first distance, the first distance being a same value as the first thickness;
- a second substrate bonded to a second side of the first substrate with a second plurality of conductive members, the second side being opposite the first side;
- a second underfill between the first and second substrates, the second underfill contacting the sidewall of the first substrate;
- and
- a lid attached to the second substrate, the dam structure, and the first chip, the lid being attached to the first chip by a first thermal interface material (TIM) and the dam structure by a second TIM, the second TIM being spaced apart from the first TIM, the lid having a first bottom surface, a second bottom surface, and a third bottom surface, each of the first, second, and third bottom surfaces being a different distance from the second substrate, the first bottom surface contacting the first TIM directly over the first chip, the second bottom surface contacting the second TIM directly over the dam structure, and the third bottom surface contacting an adhesive member on the second substrate.
4 more elements
Dependencies are inferred from the claim text.