Piezoelectric device
AssigneeMurata Manufacturing Co., Ltd.
InventorsShinsuke Ikeuchi, Seiji Umezawa, Fumiya Kurokawa, Masayuki Suzuki
Life of this patent
Estimating the term…
Abstract
In a piezoelectric device, a cantilever portion includes a fixed edge portion and a free edge portion. A plate-shaped portion includes a facing edge portion, a support edge portion, a first lateral support edge portion, and a second lateral support edge portion. The facing edge portion faces the free edge portion. The support edge portion is on an opposite side from the facing edge portion in an extension direction of the cantilever portion. The plate-shaped portion is connected to an inner surface at at least a portion of the support edge portion, at least a portion of the first lateral support edge portion, and at least a portion of the second lateral support edge portion.
Claims19
A piezoelectric device comprising:
- a base portion including an annular shape and an inner surface located on an inner side of the annular shape, a first surface located on one side in an axial direction of a center axis of the annular shape, and a second surface located on an opposite side from a side where the first surface is located in the axial direction;
- only one cantilever portion that is connected to a portion of the inner surface of the base portion at a position separated from the second surface and that extends in an in-plane direction that intersects the axial direction of the center axis;
- and
- a plate-shaped portion that is connected to another portion of the inner surface of the base portion at a position separated from the second surface and that extends along the in-plane direction so as to face the cantilever portion with a gap therebetween;
- wherein
- the cantilever portion includes a fixed edge portion connected to the inner surface and a free edge portion located on an opposite side from a side where the fixed edge portion is located in an extension direction of the cantilever portion;
- the cantilever portion includes a piezoelectric layer, a first electrode layer provided on one side of the piezoelectric layer in the axial direction of the center axis, and a second electrode layer disposed so as to face at least a portion of the first electrode layer across the piezoelectric layer;
- the plate-shaped portion includes a facing edge portion that faces the free edge portion, a support edge portion that is located on an opposite side from a side where the facing edge portion is located in the extension direction of the cantilever portion, a first lateral support edge portion that connects one end of the facing edge portion and the support edge portion to each other when viewed in the axial direction of the center axis, and a second lateral support edge portion that connects another end of the facing edge portion and the support edge portion to each other when viewed in the axial direction of the center axis;
- and
- the plate-shaped portion is connected to the inner surface at at least a portion of the support edge portion, at least a portion of the first lateral support edge portion, and at least a portion of the second lateral support edge portion.
Dependencies are inferred from the claim text.