Method for transferring a layer
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFlorian Dupont, Guillaume Rodriguez
Life of this patent
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Abstract
A method for transferring a layer of interest from a donor substrate to a receiver substrate includes providing the donor substrate made of a transparent material at a wavelength λ, forming at least one sacrificial buffer layer made of an absorbent sacrificial material at the wavelength λ, on the donor substrate, forming the layer of interest on the at least one sacrificial buffer layer, and bonding the layer of interest on the receiver substrate. The at least one sacrificial buffer layer is illuminated by a laser at the wavelength λ through the donor substrate so as to remove the at least one sacrificial buffer layer to separate the layer of interest from the donor substrate.
Claims20
A method for transferring a layer of interest from a donor substrate to a receiver substrate, the layer of interest being based upon an ABO3 material, O being oxygen, A being at least one first chemical element taken from among sodium (Na), potassium (K), barium (Ba), lithium (Li) and lead (Pb), and B being at least one chemical element taken from among lead, zirconium (Zr), titanium (Ti), niobium (Nb), and tantalum (Ta), comprising:
- providing the donor substrate made of a transparent material at a wavelength λ,
- forming at least one sacrificial buffer layer made of a sacrificial material absorbing at the wavelength λ, by epitaxy on the donor substrate,
- forming the layer of interest by epitaxy on the at least one sacrificial buffer layer,
- bonding the layer of interest on the receiver substrate, and
- illuminating by laser, at the wavelength 2 the at least one sacrificial buffer layer through the donor substrate, so as to remove at least partially the at least one sacrificial buffer layer to separate the layer of interest from the donor substrate,
- wherein forming the at least one sacrificial buffer layer comprises at least one sequence comprising:
- forming a first sacrificial buffer layer based upon the absorbent sacrificial material, then
- forming an interlayer based upon the transparent material of the donor substrate, then
- forming a second sacrificial buffer layer based upon the absorbent sacrificial material.
A method for transferring a layer of interest from a donor substrate to a receiver substrate, the layer of interest being based upon an ABO3 material, O being oxygen, A being at least one first chemical element taken from among sodium (Na), potassium (K), barium (Ba), lithium (Li) and lead (Pb), and B being at least one chemical element taken from among lead, zirconium (Zr), titanium (Ti), niobium (Nb), and tantalum (Ta), comprising:
- providing the donor substrate made of a transparent material at a wavelength λ,
- forming at least one sacrificial buffer layer made of a sacrificial material absorbing at the wavelength λ, by epitaxy on the donor substrate, the sacrificial material being different from the ABO3 material,
- forming the layer of interest by epitaxy on the at least one sacrificial buffer layer,
- bonding the layer of interest on the receiver substrate, and
- illuminating by laser, alternatingly with a first wavelength different from a second wavelength, the at least one sacrificial buffer layer through the donor substrate, so as to remove at least partially the at least one sacrificial buffer layer to separate the layer of interest from the donor substrate,
- wherein the first wavelength is in the UV range and the second wavelength is in the IR range.
Dependencies are inferred from the claim text.