Piezoelectric voice accelerometer with back cavity air pressure coupling and multiple resonance peaks

A voice accelerometer for detecting bone-conducted sound within a plurality of frequency bands, comprising:

• a substrate;
• a plurality of sensing elements associated with the plurality of frequency bands, wherein each respective frequency band of the plurality of frequency bands is associated with a corresponding one or more sensing elements of the plurality of sensing elements, each of the corresponding one or more sensing elements being associated with a respective resonance frequency within a respective frequency band, and wherein each respective sensing element of the plurality of sensing elements is configured to generate a respective output signal corresponding to vibration of the respective sensing element;
• and
• a back cavity enclosed by the plurality of sensing elements and the substrate, wherein a volume of the back cavity extends between the plurality of sensing elements and the substrate, and wherein each respective sensing element of the plurality of sensing elements is configured to vibrate in response to:
• a first force corresponding to a bone-conducted sound wave coupled into the voice accelerometer;
• and
• a second force corresponding to a back cavity pressure coupling between the plurality of sensing elements, the back cavity pressure coupling based on respective vibration of each sensing element of the plurality of sensing elements,
• wherein the respective output signals are combined based on a wiring configuration between the plurality of sensing elements and an Application-Specific Integrated Circuit (ASIC) to generate a combined signal, wherein the wiring configuration corresponds to a combined signal having a configured capacitance value for an optimal signal-to-noise ratio (SNR) with the ASIC.