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US 12,567,856 B2Granted
Surface acoustic wave filters with suppressed cavity bending
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Hiroyuki Nakamura, Keiichi Maki, Kyohei Kobayashi
Life of this patent
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Abstract
A surface acoustic wave (SAW) filter package comprises a substrate, one or more trenches formed in the substrate, a SAW filter formed in each trench of the one or more trenches, and a cavity forming layer extending horizontally across the substrate and each trench.
Claims18
A surface acoustic wave (SAW) filter package comprising:
- a piezoelectric substrate;
- a plurality of trenches formed in the piezoelectric substrate, different trenches of the plurality of trenches having different heights;
- a SAW filter disposed in each of the plurality of trenches;
- and
- a cavity forming layer extending horizontally across the piezoelectric substrate and each of the plurality of trenches.
2 more elements
A method of forming a surface acoustic wave (SAW) filter package comprising:
- forming a plurality of trenches in a piezoelectric substrate, different trenches of the plurality of trenches having different heights;
- forming a SAW filter in each of the plurality of trenches;
- and
- forming a cavity forming layer extending horizontally across the piezoelectric substrate and each of the plurality of trenches.
1 more element
A surface acoustic wave (SAW) filter package comprising:
- a piezoelectric substrate having an upper surface;
- one or more SAW filters disposed on the upper surface of the piezoelectric substrate;
- and
- a cavity defined in a layer of SiO2 disposed above each of the one or more SAW filters, sidewalls of the cavity being formed of SiO2 and having portions that are coplanar with the one or more SAW filters in a plane parallel to the upper surface of the piezoelectric substrate.
1 more element
Dependencies are inferred from the claim text.