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AssigneeKyosan Electric Mfg. Co., Ltd.
InventorsHiroshi Kunitama, Kunihiro Muto, Takuya Yoshida, Koichi Miyazaki
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A high-frequency power supply device is provided with an AC-DC converter for converting an input from a three-phase alternating-current source into a direct current and a high-frequency amplifier including multiple FET elements and outputting a high-frequency alternating-current power, with the output of the AC-DC converter being directly input to the high-frequency amplifier, and further includes a phase conversion circuit for imparting phase differences to gate signals to be input to the multiple FET elements so as to offset fluctuation components included in the direct current. The device generates the high-frequency alternating-current power by converting the input from the three-phase alternating-current source into the direct current, directly inputting the direct current to the high-frequency amplifier, imparting the phase differences to the gate signals to be input to the multiple FET elements so as to offset the fluctuation components included in the direct current, and performing switching.
A high-frequency power supply device, comprising an AC-DC conversion unit that converts an input from a three-phase AC power source into a direct current, and a high-frequency amplifier that includes a plurality of FET elements to output high-frequency AC power, wherein an output from the AC-DC conversion unit is directly input to the high-frequency amplifier without a DC/DC converter and without an LC filter, and the high-frequency power supply device comprises a phase conversion circuit that provides a gate signal to be input to each of the plurality of FET elements with a phase difference for cancelling a fluctuation component contained in the direct current.
An output control method for outputting an input from a three-phase AC power source as high-frequency AC power by using a high-frequency amplifier including a plurality of FET elements, wherein the input from the three-phase AC power source is converted into a direct current to directly input it to the high-frequency amplifier without a DC/DC converter and without an LC filter, and a phase difference for cancelling a fluctuation component contained in the direct current is provided as a gate signal to be input to each of the plurality of FET elements, so as to perform switching to produce the high-frequency AC power.
Dependencies are inferred from the claim text.