Optical semiconductor chip
AssigneeNTT, Inc.
InventorsShigeru Kanazawa, Yuta Ueda, Takahiko Shindo, Meishin Chin
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AssigneeNTT, Inc.
InventorsShigeru Kanazawa, Yuta Ueda, Takahiko Shindo, Meishin Chin
Estimating the term…
An optical semiconductor chip of the present disclosure includes a high frequency line between an electrode pad receiving a modulation signal and a modulation electrode on the optical waveguide constituting a laser. The depletion layer capacitance generated in an active layer of the optical waveguide is cancelled by an inductance component of the high frequency line. When a portion directly below the high frequency line is embedded with a low-dielectric-constant material or is made hollow, the parasitic capacitance is further reduced. The high frequency line may have a zigzag shape as well as a linear shape. The electrode pad on the optical semiconductor chip can be connected to other substrates including RF lines for modulation signal input by bumps or wire bonding.
An optical semiconductor chip, comprising:
Dependencies are inferred from the claim text.