Guardbands in substrate processing systems

A method comprising:

• identifying trace data comprising a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates;
• determining, based on a guardband, guardband violation data points of the plurality of data points of the trace data;
• determining, based on guardband violation shape characterization being associated with historical substrates that have historical property values that meet acceptable threshold substrate property values, classification of the guardband violation data points via a probability graph, wherein the guardband violation shape characterization classifies historical guardband violation data points of the historical property values as being acceptable by encircling the guardband violation data points on a multivariable graph;
• and
• causing, based on the classification, performance of a corrective action to update substrate processing via the substrate processing system.

A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:

• identifying trace data comprising a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet acceptable threshold substrate property values;
• determining, based on a guardband, guardband violation data points of the plurality of data points of the trace data associated with the substrates that have the property values that meet the acceptable threshold substrate property values;
• determining, based on the guardband violation data points, guardband violation shape characterization that classifies the guardband violation data points as being acceptable by encircling the guardband violation data points on a multivariable graph, wherein classification of additional guardband violation data points of additional trace data is to be based on the guardband violation shape characterization via a probability graph;
• and
• causing, based on the classification, performance of a corrective action to update substrate processing via the substrate processing system.