Multiplexed hologram interference exposure system
AssigneeApplied Materials, Inc.
InventorsUlrich Mueller, David Markle
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AssigneeApplied Materials, Inc.
InventorsUlrich Mueller, David Markle
Estimating the term…
The present disclosure provides an apparatus and method for fabricating optical devices. The apparatus includes a support table having process chambers and a laser used to direct a beam along a propagation path to each of the process chambers. A central mirror is centrally disposed among the process chambers and is rotatable to reflect the beam to each of the process chambers for processing. A beam splitter is disposed within each of process chambers, each beam splitter is used to receive beams from the central mirror and emits a first beam in a first direction and a second beam in a second direction. A first mirror directs the first beam to a device and a second mirror directs the second beam to the device. Each of the first and second mirror is rotatable in at least three axes.
An apparatus for fabricating optical devices, comprising:
An apparatus for fabricating hologram devices, comprising:
A method for fabricating hologram devices, comprising:
Dependencies are inferred from the claim text.