Pulsed laser micro LED inspection
AssigneeOrbotech Ltd.
InventorArie Glazer
Life of this patent
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Abstract
The system includes a laser generator, an antenna, and a processor to distinguish the photovoltaic radio frequency signals emitted by defective LEDs and functioning LEDs in a contactless manner. The laser generator emits a pulsed laser beam toward an LED. The LED generates a photovoltaic radio frequency signal when radiated by the pulsed laser beam. The antenna receives the photovoltaic radio frequency signal generated by the LED. The processor is in electronic communication with the antenna and is configured to read the photovoltaic radio frequency signal and determine whether the LED is a defective LED or a functioning LED based on the photovoltaic radio frequency signal, such as by using the frequency, amplitude, or phase shift of the radio frequency signal.
Claims20
A system comprising:
- a laser generator configured to emit a pulsed laser beam toward an LED, wherein the LED generates a photovoltaic radio frequency signal when radiated by the pulsed laser beam;
- an antenna configured to receive the photovoltaic radio frequency signal generated by the LED;
- and
- a processor in electronic communication with the antenna that is configured to:
- read the photovoltaic radio frequency signal;
- and
- determine whether the LED is a defective LED or a functioning LED based on the photovoltaic radio frequency signal.
A method comprising:
- generating a pulsed laser beam using a laser generator;
- directing the pulsed laser beam toward an LED;
- generating a photovoltaic radio frequency signal based on interaction between the pulsed laser beam and the LED;
- receiving the photovoltaic radio frequency signal using an antenna;
- reading the photovoltaic radio frequency signal with a processor in electronic communication with the antenna;
- and
- determining, using the processor, whether the LED is a defective LED or a functioning LED based on the photovoltaic radio frequency signal.
Dependencies are inferred from the claim text.