Information processing apparatus, information processing method, non-transitory computer readable media storing program, and X-ray analysis apparatus

An information processing apparatus, comprising:

• a processor configured to execute a program so as to generate a neural network that is allowed to machine-learn teacher data using
• input profile data in relation to an intensity of X-ray from a thin film,
• analysis profile data obtained from the input profile data as input data, the analysis profile data including
• correct solution analysis profile data representing accurate physical properties of the thin film, and
• one or more false solution profile data, each representing inaccurate physical properties of the thin film, and
• diagnostic data corresponding to the analysis profile data,
• wherein the diagnostic data corresponding to each of the false solution profile data includes a reason for diagnosing the false solution profile data as false, wherein the reason includes a textual explanation identifying a specific discrepancy between the input profile data and the corresponding false solution analysis profile data attributable to at least one physical property of the thin film,
• wherein the diagnostic data corresponding to the correct solution analysis profile data indicates correctness of the correct solution analysis profile data,
• wherein the at least one physical property includes structure, film thickness, roughness, density, state, constituent element, lattice constant, or size distribution of the thin film;
• and
• a memory storing the neural network.

An information processing method executed by an information processing apparatus, comprising:

• outputting a diagnostic result diagnosing an analysis profile result by inputting an input profile result in relation to an intensity of X-ray from a thin film and the analysis profile result of the input profile result to a neural network, wherein
• the neural network is a neural network that is allowed to machine-learn teacher data using
• input profile data in relation to an intensity of X-ray from a thin film,
• analysis profile data obtained from the input profile data as input data, the analysis profile data including
• correct solution analysis profile data representing accurate physical properties of the thin film, and
• one or more false solution profile data, each representing inaccurate physical properties of the thin film, and
• diagnostic data corresponding to the analysis profile data,
• wherein the diagnostic data corresponding to each of the false solution profile data includes a reason for diagnosing the false solution profile data as false, wherein the reason includes a textual explanation identifying a specific discrepancy between the input profile data and the corresponding false solution analysis profile data attributable to at least one physical property of the thin film,
• wherein the diagnostic data corresponding to the correct solution analysis profile data indicates correctness of the correct solution analysis profile data,
• wherein the at least one physical property includes structure, film thickness, roughness, density, state, constituent element, lattice constant, or size distribution of the thin film.