Surface shape measuring apparatus and surface shape measuring method

A surface shape measuring apparatus a for measuring a specular surface, comprising:

• an illuminator configured to illuminate the specular surface with a first light pattern;
• an imaging device configured to capture an image of a second light pattern which is light transmitted through the illuminator after the first light pattern from the illuminator is reflected by the specular surface;
• and
• a processing apparatus configured to acquire a positional deviation amount of the second light pattern from a predetermined position in the image captured by the imaging device, and to output information related to a surface shape of the specular surface acquired from the positional deviation amount,
• wherein the illuminator includes:
• one or more light sources;
• a light guide plate having a light incident surface, a first principal surface, and a second principal surface, and configured to guide light emitted from the one or more light sources and incident thereto through the light incident surface;
• and
• a light emitting part, disposed in one of an inside and a surface of the light guide plate, and configured to emit fluorescence in response to receiving light guided by the light guide plate, and
• the illuminator emits the first light pattern formed to include the fluorescence emitted from the light emitting part.

A surface shape measuring method for measuring a specular surface by a surface shape measuring apparatus having an illuminator, an imaging device, and a processing apparatus, the illuminator including one or more light sources, a light guide plate having a light incident surface, a first principal surface, and a second principal surface, and configured to guide light emitted from the one or more light sources and incident thereto through the light incident surface, and a light emitting part disposed in one of an inside and a surface of the light guide plate and configured to emit fluorescence in response to receiving light guided by the light guide plate, the surface shape measuring method comprising:

• illuminating, by the illuminator, the specular surface with a first light pattern formed to include the fluorescence emitted from the light emitting part;
• capturing, by the imaging device, an image of a second light pattern which is light transmitted through the illuminator after the first light pattern from the illuminator is reflected by the specular surface;
• and
• acquiring, by the processing apparatus, a positional deviation amount of the second light pattern from a predetermined position in the image captured by the imaging device, and outputting information related to a surface shape of the specular surface acquired from the positional deviation amount.

A surface shape measuring apparatus for measuring a specular surface, comprising:

• an illuminator having a flat plate shape and configured to illuminate the specular surface with a first light pattern;
• an imaging device configured to capture an image of a second light pattern which is light transmitted through the illuminator after the first light pattern from the illuminator is reflected by the specular surface;
• and
• a processing apparatus configured to acquire a positional deviation amount of the second light pattern from a predetermined position in the image captured by the imaging device, and to output information related to a surface shape of the specular surface acquired from the positional deviation amount,
• wherein a center of the illuminator and a center of the imaging device are arranged on a normal to the specular surface.