Photodefined aperture plate and method for producing the same

An aperture plate for use in aerosolizing a liquid in a nebulizer, comprising:

• a first layer formed through a photolithography process, the first layer defining a first plurality of apertures;
• a second layer formed through a photolithography process, the second layer positioned above the first layer and defining a second plurality of apertures;
• and
• a third layer formed through a photolithography process, the third layer positioned above the second layer and defining a third plurality of apertures, wherein a first aperture from the first plurality of apertures, a second aperture from the second plurality of apertures, and a third aperture from the third plurality of apertures form three stepped-down cylinders.

A method for manufacturing an aperture plate for aerosolizing a liquid in a nebulizer, the method comprising:

• applying a first patterned photolithography mask above the releasable seed layer;
• electroplating a first material above exposed portions of the releasable seed layer and between portions of the first patterned photolithography mask;
• applying a second patterned photolithography mask above the first material;
• electroplating a second material above exposed portions of the first material and between portions of the second patterned photolithography mask;
• removing the first patterned photolithography mask to form a first layer defining a first plurality of apertures;
• removing the second patterned photolithography mask to form a second layer defining a second plurality of apertures, wherein a first aperture from the first plurality of apertures and a second aperture from the second plurality of apertures form two stepped-down cylinders;
• and
• etching the releasable seed layer to release the first material and the second material.