Head substrate, liquid discharging head, and liquid discharging device

Abstract

A head substrate provided on a liquid discharging head, comprising an electrothermal conversion element configured to generate heat for causing liquid to be discharged, one or more first switch elements configured to drive the electrothermal conversion element, a temperature detection element configured to detect a temperature of the electrothermal conversion element, and one or more second switch elements configured to control the temperature detection element, wherein a well layer that forms the first switch elements and a well layer that forms the second switch elements are electrically isolated by a deep element isolation portion formed to be deeper than the well layers.

Dependencies are inferred from the claim text.