Method and apparatus for irradiating a material with an energy beam
AssigneeEOS GmbH Electro Optical Systems
InventorsPeter Holfelder, Armin Witte
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Abstract
A method and an irradiation device for locally melting a material are described, wherein an area of incidence of the energy beam on the material is moved. In the process, at least one first energy beam and one second energy beam are generated, the second energy beam is moved relative to the first energy beam and the first energy beam and the second energy beam are coupled in a common beam path into an energy beam movement unit in such a way that they are moved together over the material as a combination energy beam.
Claims14
A method for irradiating a material with an energy source, wherein an area of incidence of the energy source on the material is moved in a process for locally melting the material, comprising:
- producing at least one first energy beam and at least one second energy beam from the energy source, the first energy beam having a first beam intensity profile extending over a first energy beam interior spot extent, the at least one first energy beam further having a perimeter surrounding the first energy beam interior spot extent, the second energy beam having a second beam intensity profile extending over a second energy beam spot extent that is smaller than the first energy beam interior spot extent;
- and
- moving the second energy beam within the first energy beam interior spot extent during a melting process, wherein the first energy beam and the second energy beam are coupled into an energy beam movement unit in a common scanning beam path such that the first energy beam and the second energy beam are moved together as a combination energy beam with the second energy beam moving within the first energy beam interior spot extent on a path around and along the perimeter as the combination energy beam traverses over the material.
An irradiation device for irradiating a material with an energy source, wherein an area of incidence from the energy source on the material is moved in a melting process, the irradiation device comprising:
- an energy beam source system for generating a first energy beam and a second energy beam, the first energy beam having a first beam intensity profile extending over a first energy beam interior spot extent, the first energy beam having a perimeter surrounding the first energy beam interior spot extent, the second energy beam having a second beam intensity profile extending over a second energy beam interior spot extent that is smaller than the first energy beam interior spot extent, the first beam intensity profile having an intensity along the perimeter that is larger than an intensity along the first beam intensity profile radially inward of the perimeter;
- a first energy beam movement unit for moving the second energy beam relative to the first energy beam;
- and
- an energy beam combination device and a second energy beam movement unit, which are formed and arranged relative to one another such that the first energy beam and the second energy beam are coupled into the second energy beam movement unit in a common beam path such that the first energy beam and the second energy beam are moved together as a combination energy beam over the material, with the second energy beam moving within the first energy beam interior spot extent along the perimeter as the combination energy beam traverses over the material.
Dependencies are inferred from the claim text.