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US 12,564,871 B2Granted
Cleaning fixture for showerhead assemblies
AssigneeASM IP Holding B.V.
InventorsDinkar Nandwana, Allen D'Ambra, Dinh Tran, Ankit Kimtee, Eric Shero
Life of this patent
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Abstract
Cleaning fixtures for cleaning a showerhead assembly are disclosure. The cleaning fixtures include: a fixture body incorporating three or more cavities, each cavity being separate from an adjacent cavity by a partition, and a number of channels associated with each cavity for fluidly connecting the cavities with an upper surface of the fixture body.
Claims20
A cleaning fixture configured for cleaning a showerhead assembly comprising:
- a fixture body configured to be mounted to the showerhead assembly, the fixture body having an upper surface and a lower surface opposite the upper surface, the fixture body comprising:
- an inner cavity open to the lower surface of the fixture body, the inner cavity being fluidly connected to the upper surface of the fixture body by one or more inner channels,
- an outer cavity open to the lower surface of the fixture body, the outer cavity being fluidly connected to the upper surface of the fixture by one or more outer channels;
- one or more intermediate cavities open to the lower surface of the fixture body and positioned between the inner cavity and the outer cavity, the one or more intermediate cavities being fluidly connected to the upper surface of the fixture by one or more intermediate channels;
- and
- two or more partitions separating the one or more intermediate cavities from the inner cavity and the outer cavity,
- wherein the two or more partitions extend to the lower surface, and
- wherein the one or more intermediate cavities surrounds the inner cavity.
5 more elements
A cleaning fixture for cleaning a showerhead assembly comprising:
- a fixture body configured to be mounted to the showerhead assembly, the fixture body having an upper surface and a lower surface opposite the upper surface, the fixture body comprising;
- three or more cavities open to the lower surface of the fixture body, each cavity being separated from an adjacent cavity by a partition;
- and
- one or more channels associated with each cavity, the one or more channels fluidly connecting each of cavities to the upper surface of the fixture body,
- wherein at least one of the three or more cavities surrounds another of the three or more cavities, and
- wherein the partition extends to the lower surface.
3 more elements
A method cleaning a showerhead assembly comprising:
- providing a showerhead plate with an undesirable material disposed on a surface of the showerhead plate, the undesirable film having a non-uniform average thickness;
- mounting a cleaning fixture to the shower head plate, the cleaning fixture comprising a fixture body having an upper surface and a lower surface opposite the upper surface, the fixture body comprising;
- three or more cavities disposed in the lower surface of the fixture body, each cavity being separated from an adjacent cavity by a partition;
- one or more channels associated with each cavity, the one or more channels fluidly connecting each of cavities to the upper surface of the fixture body;
- and
- at least three independent conduits, each independent conduit connected to the one or more channels associated with each cavity,
- wherein at least one of the three or more cavities surrounds another of the three or more cavities, and
- wherein the partition extends to the lower surface;
- providing a reservoir configured for retaining a cleaning chemical;
- and
- mounting the cleaning fixture and the showerhead plate to the reservoir using a mounting clamp;
- and
- regulating the flow of a cleaning chemical through the three or more cavities utilizing a flow controller configured for independently controlling the flow of the cleaning chemical through each one of the three or more cavities, and
- asymmetrically removing the undesirable material disposed on the surface of showerhead plate.
11 more elements
Dependencies are inferred from the claim text.