Method of forming package structure including antennas
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Yu Liang, Kai-Chiang Wu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Yu Liang, Kai-Chiang Wu
Estimating the term…
A package structure including a semiconductor die, a redistribution layer, a plurality of antenna patterns, a die attach film, and an insulating encapsulant is provided. The semiconductor die have an active surface and a backside surface opposite to the active surface. The redistribution layer is located on the active surface of the semiconductor die and electrically connected to the semiconductor die. The antenna patterns are located over the backside surface of the semiconductor die. The die attach film is located in between the semiconductor die and the antenna patterns, wherein the die attach film includes a plurality of fillers, and an average height of the die attach film is substantially equal to an average diameter of the plurality of fillers. The insulating encapsulant is located in between the redistribution layer and the antenna patterns, wherein the insulating encapsulant encapsulates the semiconductor die and the die attach film.
A method, comprising:
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.