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US 12,564,070 B2Granted
Method of manufacturing semiconductor device
AssigneeRenesas Electronics Corporation
InventorRyusei Takaishi
Life of this patent
Estimating the term…
Abstract
A bonding region is specified by having a horizontal line partially constituting crosshairs displayed on a monitor of a wire bonding apparatus superimposed on a first line segment of a first marker, and having a vertical line partially constituting the crosshairs superimposed on a first line segment of a second marker.
Claims9
A method of manufacturing a semiconductor device, comprising steps of:
- (a) preparing a semiconductor chip having a main surface, a pad formed on the main surface, and an insulating film formed on the main surface;
- (b) after the step of (a), specifying a bonding region in a portion of the pad exposed in an opening portion formed in the insulating film;
- and
- (c) after the step of (b), connecting a bonding wire to the bonding region of the pad,
- wherein a planar shape of the pad has a quadrangular shape including a first side and a second side intersecting the first side,
- wherein a planar shape of the opening portion has a quadrangular shape including a first side and a second side intersecting the first side,
- wherein the first side of the pad or the first side of the opening portion is further provided with a first marker,
- wherein the second side of the pad or the second side of the opening portion is further provided with a second marker,
- wherein the first marker has a first line segment orthogonal to the first side at a first position of the first side,
- wherein the second marker has a first line segment orthogonal to the second side at a first position of the second side,
- wherein, in the step of (b), the bonding region is specified by having a horizontal line partially constituting crosshairs displayed on a monitor of a wire bonding apparatus superimposed on the first line segment of the first marker, and having a vertical line partially constituting the crosshairs superimposed on the first line segment of the second marker.
8 more elements
Dependencies are inferred from the claim text.