Integrated RC architecture, and methods of fabrication thereof
AssigneeMurata Manufacturing Co., Ltd.
InventorsStéphane Bouvier, Larry Buffle, Sophie Gaborieau
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AssigneeMurata Manufacturing Co., Ltd.
InventorsStéphane Bouvier, Larry Buffle, Sophie Gaborieau
Estimating the term…
RC architectures are provided that include a substrate provided with a capacitor having a thin-film top electrode portion at a surface of the substrate on one side thereof. The resistance provided in series with the capacitor is controlled by providing a contact plate, spaced from the thin-film top electrode portion, and a set of plural bridging contacts extending between, and electrically interconnecting, the thin-film top electrode portion and the contact plate. Different resistance values can be set by appropriate selection of the number of bridging contacts. The capacitor can be a three-dimensional capacitor and contacts are then provided on respective first and second sides of the substrate, which face each other in the thickness direction of the substrate.
An integrated RC component comprising:
Dependencies are inferred from the claim text.