Small sized acoustic wave device with partially different interdigital transducer electrode thicknesses
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Shoji Okamoto, Hironori Fukuhara
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Abstract
A radio frequency multiplexer comprises a piezoelectric substrate, a first surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate and having a first metal layer formed of a first metal and a second metal layer disposed on the first metal layer and formed of a second metal having a higher density than the first metal, and a second surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate and having a first metal layer formed of the first metal, but lacking the second metal layer.
Claims18
A radio frequency multiplexer comprising:
- a piezoelectric substrate;
- a first surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate, the interdigital transducer electrodes of the first surface acoustic wave resonator having a first metal layer formed of a first metal and a second metal layer disposed on the first metal layer and formed of a second metal having a higher density than the first metal;
- and
- a second surface acoustic wave resonator including interdigital transducer electrodes disposed on the piezoelectric substrate, the interdigital transducer electrodes of the second surface acoustic wave resonator having the first metal layer formed of the first metal, but lacking the second metal layer, the first surface acoustic wave resonator being a single mode resonator, the second surface acoustic wave resonator being a multi-mode resonator.
Dependencies are inferred from the claim text.