Temperature control system and temperature control method for semiconductor manufacturing device

A temperature control system of a semiconductor manufacturing device, the temperature control system comprising:

• a first heating media storage configured to store low-temperature heating media;
• a second heating media storage configured to store high-temperature heating media, wherein a temperature of the high-temperature heating media is greater than a temperature of the low-temperature heating media;
• a mixing valve configured to mix the low-temperature heating media and the high-temperature heating media at a predetermined mixing ratio, and to supply the mixed heating media to a load;
• a first bypass valve configured to recover the low-temperature heating media output by the first heating media storage to the first heating media storage;
• a second bypass valve configured to recover the high-temperature heating media output by the second heating media storage to the second heating media storage;
• a distribution valve configured to distribute a recovered heating media recovered from the load to the first heating media storage and the second heating media storage;
• a synchronous controller configured to synchronously control the mixing valve, the first bypass valve, the second bypass valve, and the distribution valve based on the mixing ratio;
• a flow path provided through which heating media flows through the first heating media storage, the second heating media storage, the mixing valve, the first bypass valve, the second bypass valve, the load, and the distribution valve;
• a mixing temperature sensor disposed at an output end of the mixing valve in the flow path;
• a reference temperature sensor disposed more adjacent to the load than the mixing temperature sensor in the flow path;
• and
• a control device configured to obtain a target reference temperature for a reference temperature measured by the reference temperature sensor from an external entity, to change the target reference temperature to a target mixing temperature of a mixing temperature based on a relationship model between the reference temperature and the mixing temperature measured by the mixing temperature sensor, and to control a position of the mixing valve based on the target mixing temperature and the mixing temperature.