Microscopic observation method and microscopic observation device
AssigneeIndustrial Technology Research Institute
InventorsSheng-Li Chang, Chi Shen Chang, Chih-Cheng Hsu
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AssigneeIndustrial Technology Research Institute
InventorsSheng-Li Chang, Chi Shen Chang, Chih-Cheng Hsu
Estimating the term…
A microscopic observation method configured to observe a specimen in a specimen carrier that includes the following steps: placing the specimen carrier at an observation point; obtaining a length of the specimen carrier along a movement direction, a thickness of the specimen carrier along an observation direction of a microscope objective, an observation angle of the microscope objective, and a relative distance between a lateral surface of the specimen carrier and the microscope objective along the movement direction; and adjusting an incident angle of a light beam emitted from a dark-field illumination towards the specimen carrier according to a calculation result of the length, the thickness, the observation angle, and the relative distance.
A microscopic observation method, configured to observe a specimen in a room formed between a bottom, a wall standing on the bottom and a cover disposed on the wall of a specimen carrier made of light-passable material, wherein steps of the microscopic observation method comprise:
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