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US 12,560,553 B2Granted
Laser crystallization monitoring device and method of laser crystallization monitoring using the same
AssigneeSamsung Display Co., Ltd.
InventorJi-Hwan Kim
Life of this patent
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Abstract
A laser crystallization monitoring device includes a stage that supports a substrate, a laser beam generator that emits a laser beam to the substrate, a mirror that reflects the laser beam emitted from the laser beam generator and that rotates around a rotation axis, a first telecentric f-theta lens located on the laser beam path between the mirror and the substrate, a second telecentric f-theta lens through which the laser beam reflected from the substrate passes, and a monitor that inspects the laser beam passing through the second telecentric f-theta lens.
Claims8
A laser crystallization monitoring device, comprising:
- a stage that supports a substrate;
- a laser beam generator that emits a laser beam to the substrate;
- a mirror that reflects the laser beam emitted from the laser beam generator and that rotates around a rotation axis;
- a first telecentric f-theta lens located on the laser beam path between the mirror and the substrate;
- a second telecentric f-theta lens through which the laser beam reflected from the substrate passes;
- and
- a monitor that inspects the laser beam passing through the second telecentric f-theta lens,
- wherein the second telecentric f-theta lens and the first telecentric f-theta lens are disposed in mirror symmetry with respect to a normal line of the substrate.
5 more elements
Dependencies are inferred from the claim text.