Ultra low-na refractive index profiling system and method for filtering out severely disturbing diffraction effects
AssigneeHeraeus Quartz North America LLC
InventorsMaximilian Schmitt, Evan P. Green
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AssigneeHeraeus Quartz North America LLC
InventorsMaximilian Schmitt, Evan P. Green
Estimating the term…
A method for determining a refractive index profile of an optical object having a cylindrical surface includes: (a) scanning the surface at a first plurality of scanning locations with a pinhole aperture in a path of one or more optical beams; (b) measuring a first deflection function based detecting the optical beams after deflection by the optical object for each of the first plurality of scanning locations; (c) scanning the surface at a second plurality of scanning locations where the path of the optical beams is free of the pinhole aperture; (d) measuring a second deflection function based on detecting the optical beams after deflection by the optical object for each of the second plurality of scanning locations; (e) merging at least portions of the first and second deflection functions to obtain a composite deflection function; and (f) calculating the refractive index profile using the composite deflection function.
A method for determining a refractive index profile of an optical object having a cylindrical surface and a longitudinal cylinder axis, the method comprising:
A system for determining a refractive index profile of an optical object having a cylindrical surface and a longitudinal cylinder axis, the system comprising:
Dependencies are inferred from the claim text.