Micro concentration monitoring apparatus
AssigneeKorea University Research and Business Foundation
InventorsHyung Min Lee, Seung Beom Ku
Life of this patent
Estimating the term…
Abstract
Disclosed is a micro concentration monitoring apparatus. A micro concentration monitoring apparatus includes: a variable frequency driver circuit unit that is coupled to a MEMS sensor and supplies constant power to the MEMS sensor within a set bandwidth; and a reading circuit unit that measures a resonance frequency displacement value of the MEMS sensor according to a change in dielectric constant of a target based on power supplied from the variable frequency driver circuit, and measures the resonance frequency displacement value of the MEMS sensor through a plurality of measurement channels, respectively.
Claims7
A micro concentration monitoring apparatus, comprising:
- a variable frequency driver circuit unit that is connected to a MEMS sensor through a coupler and supplies constant power to the MEMS sensor within a set bandwidth;
- and
- a reading circuit unit that measures a resonance frequency displacement value of the MEMS sensor according to a change in dielectric constant of a target based on power supplied from the variable frequency driver circuit, and measures the resonance frequency displacement value of the MEMS sensor through a plurality of measurement channels, respectively.
Dependencies are inferred from the claim text.