Center feed symmetric flow valve for plasma chambers

A symmetric flow valve for use in a substrate processing chamber, comprising:

• a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein exterior surfaces of the sidewalls comprise one or more rounded walls and a plurality of linearly extending walls, wherein the plurality of linearly extending walls are linear along a vertical direction and a horizontal direction, wherein the top plate includes a plurality of axisymmetrically disposed openings arranged in a non-linear manner, and wherein the bottom plate includes a port opening;
• an actuator disposed above the top plate and coupled to a central region of the top plate radially inward of the plurality of axisymmetrically disposed openings;
• and
• a poppet disposed in the interior volume and coupled to a shaft of the actuator at a center of the poppet to move the poppet vertically within the interior volume, wherein the poppet is configured to selectively seal the plurality of axisymmetrically disposed openings or the port opening, and wherein the interior volume is asymmetrical about the shaft.

A substrate processing chamber, comprising:

• a chamber body having a floor, wherein the floor includes a plurality of chamber openings;
• a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes a plurality of axisymmetrically disposed openings arranged in a non-linear manner corresponding with the plurality of chamber openings, and wherein the bottom plate includes a port opening;
• an actuator disposed above the top plate and coupled to a central region of the top plate radially inward of the plurality of axisymmetrically disposed openings;
• and
• a poppet disposed in the interior volume and coupled to the actuator to move the poppet vertically within the interior volume, wherein the poppet is configured to selectively seal the plurality of axisymmetrically disposed openings or the port opening.