US 12,560,198 B2Granted

System and method for multi-DOF cross-pivot flexure bearing with enhanced range and enhanced load capacity

AssigneesLawrence Livermore National Security, LLC, The Regents of the University of California, Bright Silicon Technologies, Inc.

InventorsRobert Matthew Panas, Jonathan Hopkins, Robert McHenry

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Abstract

The present disclosure relates to a cross-pivot flexure system. In one embodiment the system may incorporate a center post element having a first head at a first end thereof, and a second head at a second end thereof. The first head may be arranged along a first longitudinal axis and the second head may be arranged along a second longitudinal axis. The first head may be attached to an immovable ground element through at least one first cross-pivot element for enabling rotational movement about the first longitudinal axis, while the second head may be attached to a motion stage flexure via at least one second cross-pivot element. This construction permits rotational movement of the second head about the second rotational axis. The first and second longitudinal axes are further arranged so that they intersect one another.

Claims18

Dependent claims

A cross-pivot flexure system comprising:

an elongated, column-like center post element having a center post, a first head directly coupled to a first end of the center post, and the first head extending laterally of the first end of the center post;
the center post including a second head at a second end of the center post, the second head directly coupled to the second end of the center post and projecting laterally, non-parallel, to the first head, and the first and second ends of the center post being at opposing longitudinal ends of the center post;
a first cross-pivot element connected only to the first head at a first end thereof, and free from the center post at a second end thereof;
a second cross-pivot element connected only to the second head at a first end thereof, and free from the center post at a second end thereof;
the first head arranged along a first longitudinal axis;
the second head arranged along a second longitudinal axis;
the first head attached to a support element, wherein the support element is independent of the center post, through the second end of the first cross-pivot element for enabling rotational movement of the center post about the first longitudinal axis;
the first cross-pivot element comprising an inmost planar surface having a first plane, the center post comprising an outer planar surface facing the inmost planar surface and having a second plane, the first and second planes further extending at an angle non-parallel to one another so as to diverge away from the first head, and the second plane extending at an angle parallel to the longitudinal axis of the center post;
and
the second head further attached to a motion stage flexure, independent of the center post element, via the second end of the second cross-pivot element, permitting rotational movement of the second head about the second longitudinal axis.

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A method for forming a cross-pivot flexure system, the method comprising:

coupling a first end of a first cross-pivot flexure blade directly to a first head at a first longitudinal end of an elongated, column-like center post element having a center post, the first head extending laterally of the center post and being connected directly to the first cross-pivot flexure blade, a second end of the first cross-pivot flexure blade being free from the center post;
coupling a second end of the first cross-pivot flexure blade directly to a support component, the support component being independent of the center post element, and further such that a first rotational axis extends through the first cross-pivot flexure blade parallel to a longitudinal axis of the first head;
coupling a first end of a second cross-pivot flexure blade directly to a second head at an opposite second longitudinal end of the center post, the second cross-pivot flexure having a second end which is free of the center post, and the second end of the second cross-pivot flexure blade being connected directly to a movable stage element, independent of the center post element, and spaced apart from the first head and independent of the first head, such that a second rotational axis extends through the second cross-pivot flexure blade parallel to a longitudinal axis of the second head;
the first cross-pivot element comprising an inmost planar surface having a first plane, the center post comprising an outer planar surface facing the inmost planar surface and having a second plane, the first and second planes further extending at an angle non-parallel to one another so as to diverge away from the first head, and the second plane extending at an angle parallel to the longitudinal axis of the center post;
and
further orienting the second longitudinal axis non-parallel to the first rotational axis.

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Dependencies are inferred from the claim text.