Molybdenum pentachloride conditioning and crystalline phase manipulation
AssigneeL'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Proceédés Georges Claude
InventorsFeng Li, Yumin Liu, Sameh Helmy, Peng Zhang, Jean-Marc Girard
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Abstract
A method of conditioning MoCl5 comprises heating a container of MoCl5 to a temperature ranging from approximately 140° C. to 190° C. for a period ranging from approximately 2 hours to approximately 100 hours to produce a MoCl5-containing composition comprising approximately 10% weight to approximately 60% weight of Phase 1 MoCl5 and 90% weight to approximately 40% weight of Phase 2 MoCl5 as determined by X-ray diffraction. This MoCl5-containing composition is expected to be more thermally stable and provides stable vapor supply.
Claims18
A method of conditioning MoCl5, the method comprising
- heating a container of a mixture of Phase 1 and Phase 3 MoCl5 that contains approximately 10% weight to approximately 90% weight of Phase 3 MoCl5 to a temperature ranging from approximately 140° C. to 190° C. for a period ranging from approximately 2 hours to approximately 100 hours to produce a MoCl5-containing composition comprising approximately 10% weight to approximately 60% weight of Phase 1 MoCl5 and 90% weight to approximately 40% weight of Phase 2 MoCl5, as determined by X-ray diffraction,
- wherein the Phase 3 MoCl5 is transferred to the Phase 1 and Phase 2 MoCl5.
Dependencies are inferred from the claim text.