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US 12,559,855 B2Granted
Composite substrate, method for producing composite substrate, and method for producing gallium oxide crystal film
AssigneeNGK Insulators, Ltd.
InventorsJun Yoshikawa, Miho Maeda, Hiroyuki Shibata
Life of this patent
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Abstract
A composite substrate includes: a base substrate and an α-Ga2O3 crystal film that is provided on the base substrate, has a thickness of 10 μm or more, and has at least one alkali metal element content of 1.2×1015 atoms/cm3 or more and 1.0×1018 atoms/cm3 or less.
Claims10
A composite substrate comprising:
- a base substrate and
- an α-Ga2O3 crystal film that is provided on the base substrate, has a thickness of 10 μm or more, and has at least one alkali metal element content of 1.2×1015 atoms/cm3 or more and 1.0×1018 atoms/cm3 or less.
Dependencies are inferred from the claim text.