Rapid cross-linkable neutral underlayers for contact hole self-assembly of polystyrene-b-poly(methyl methacrylate) diblock copolymers and their formulation thereof

A random copolymer comprising the following repeat units of structure (I), (II), (III), and (IV)

• wherein,
• R1 is selected from the group consisting of a C-1 to C-4 alkyl,
• R2, R3, R5, and R6 are independently selected from the group consisting of H, and a C-1 to C-4 alkyl,
• R4 is a C-1 to C-4 alkyl, and n is an integer from 0 to 5, and
• R7 is an alkylene is selected from a C-1 to C-4 alkylene, wherein further based on the total moles of all repeat units, the repeat unit of structure (I) is present in a range from 8 mol % to 58 mol %, the repeat unit of structure (II) is present in a range from 20 mole % to 80 mole %, the repeat unit of structure (III) is present in a range from 10 mole % to 20 mole %, the repeat unit of structure (IV) is present in a range from 1 mole % to 5 mole %, and each mole % for these repeat units are individually selected such that the sum of all the repeat units mole % values for the repeat units present in said random copolymer equals 100 mole %.