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US 12,558,661 B2Granted
Vapor delivery apparatus, associated vapor phase reactor and methods of use
AssigneeASM IP Holding B.V.
InventorLeonard Rodriguez
Life of this patent
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Abstract
Vapor delivery apparatus configured for generating a gaseous precursor from solid source precursor particles in a fluidized bed are disclosed. In addition, vapor phase reactors including a vapor delivery apparatus including a fluidized bed of solid precursor are also disclosed. Methods for monitoring and a controlling a vapor delivery system including a fluidized bed also disclosed.
Claims20
A vapor delivery apparatus configured for converting a solid source material to a gaseous precursor for use in a vapor phase reactor, the apparatus comprising:
- a vessel comprising a vessel interior;
- a fluidized bed region disposed within the vessel interior, the fluidized bed region configured for containing a plurality of solid precursor particles;
- a carrier gas inlet into the vessel interior;
- a heating system configured for heating the fluidized bed region;
- a pressure sensing system constructed and arranged to generate a differential pressure signal (ΔPs) by monitoring a pressure drop (ΔP) across the plurality of solid precursor particles when a carrier gas flows upwards through the plurality of solid precursor particles to form a fluidized bed within the fluidized bed region,
- wherein the pressure sensing system comprises a first pressure sensor device disposed upstream of the fluidized bed region and a second pressure sensor device disposed downstream of the fluidized bed region to monitor the pressure drop across the plurality of solid precursor particles;
- and
- a control system constructed and arranged to receive the differential pressure signal (ΔP) from the pressure sensing system and calculate a remaining weight (W) of the plurality of solid precursor particles within the fluidized bed region.
5 more elements
A vapor phase reactor configured for vapor processing of substrates, comprising:
- a vapor delivery apparatus comprising;
- a carrier gas inlet;
- a fluidized bed region disposed within an inner volume of the vapor delivery apparatus, the fluidized bed region constructed and arranged to allow a carrier gas to lift and stir a plurality of solid precursor particles to form a fluidized bed;
- a heater configured to heat the fluidized bed region;
- a precursor gas outlet disposed downstream of the fluidized bed region;
- a pressure sensing system constructed and arranged to monitor a pressure drop (ΔP) across the fluidized bed and generate a differential pressure signal (ΔP) from said pressure drop, wherein the pressure sensing system comprises a first pressure sensor disposed upstream of the fluidized bed region and a second pressure sensor disposed downstream of the fluidized bed region;
- and
- a vapor phase reaction chamber in fluid communication with the vapor delivery apparatus, wherein the vapor phase reaction chamber is configured to receive a gaseous precursor generated in the vapor delivery apparatus;
- a reactor control system constructed and arranged to receive the differential pressure signal (ΔPs) from the pressure sensing system and calculate a remaining weight of the fluidized bed;
- and
- an alert system linked to the reactor control system, wherein the alert system is configured to be activated by a signal generated from the reactor control system in response to the weight of the fluidized bed reaching a predetermined minimum value.
8 more elements
A method for monitoring and controlling a vapor delivery system, the method comprising:
- flowing a carrier gas upward through a plurality of solid source particles within an inner volume of a vessel to form a fluidized bed comprising a bed weight;
- generating a gaseous precursor from the fluidized bed by vaporizing a portion of the plurality of solid source particles;
- monitoring a pressure differential (ΔP) across the fluidized bed as the gaseous precursor is generated by sensing a first pressure upstream of the fluidized bed and a second pressure downstream of the fluidized bed;
- calculating a remaining bed weight within the fluidized bed as the bed weight reduces as a result of the vaporization of a portion of the plurality of solid source particles;
- and
- activating an alert system in response to the remaining bed weight being less than a predetermining minimum value.
3 more elements
Dependencies are inferred from the claim text.