Light detecting device for hyperspectral imaging, method for manufacturing structure for hyperspectral imaging, and method for manufacturing light detecting device for hyperspectral imaging

A light-detecting device comprising:

• a filter array including filters arranged two-dimensionally, the filters including a light-incident surface and light-emitting surfaces, the filters corresponding one-to-one to light-emitting surfaces, the filters including multiple types of filters exhibiting mutually different transmission spectra;
• an image sensor including light-detecting elements and a light-detecting surface facing the light-emitting surfaces;
• and
• a substrate on the light-incident surface of the filters, wherein
• distances between the light-emitting surfaces and the light-detecting surface vary among the multiple types of filters, and
• the substrate is provided with an anti-reflective film on a surface on an opposite side from a surface on the filter array side.

A light-detecting device comprising:

• a filter array including filters arranged two-dimensionally, the filters including a light-incident surface and light-emitting surfaces, the filters corresponding one-to-one to light-emitting surfaces, the filters including multiple types of filters exhibiting mutually different transmission spectra;
• an image sensor including light-detecting elements and a light-detecting surface facing the light-emitting surfaces;
• spacers caught between the filter array and the image sensor, wherein
• distances between the light-emitting surfaces and the light-detecting surface vary among the multiple types of filters,
• the spacers prescribe the distances, and
• at least a portion of the light-emitting surfaces of the filters and at least a portion of the light-detecting surface are bonded to each other with an adhesive.

A light detecting device comprising:

• a filter array including filters arranged two-dimensionally, the filters including a light-incident surface and light-emitting surfaces, the filters corresponding one-to-one to light-emitting surfaces, the filters including multiple types of filters exhibiting mutually different transmission spectra;
• an image sensor including light-detecting elements and a light-detecting surface facing the light-emitting surfaces;
• and
• a signal processing circuit, wherein
• distances between the light-emitting surfaces and the light-detecting surface vary among the multiple types of filters, and
• the signal processing circuit generates spectral images corresponding one-to-one to four or more wavelength bands on a basis of a compressed image encoded by the filter array.

A method for manufacturing a structure, the method comprising:

• a step for preparing a filter array having an uneven surface and including filters arranged two-dimensionally, the filters having mutually different transmission spectra;
• a step for forming a photoresist on the uneven surface of the filter array by spin coating;
• and
• a step for forming spacers on the uneven surface of the filter array by patterning the photoresist.