Microwave providing apparatus, system including the same, and method of manufacturing semiconductor device
AssigneeSemes Co., Ltd.
InventorsYoonseok Choi, Hanlim Kang, Hyunwoo Jo, Sangjeong Lee
Life of this patent
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Abstract
Provided is a system including a microwave source configured to generate microwaves, a branch apparatus including an input port connected to the microwave source, first and second chambers configured to process a wafer by using the microwaves, a first filter configured to transfer the microwaves to or cut off the microwaves from the first chamber, and connected to a first output port of the branch apparatus, and a second filter configured to transfer the microwaves to or cut off the microwaves from the second chamber, and connected to a second output port of the branch apparatus.
Claims19
A system comprising:
- a microwave source configured to generate microwaves;
- a branch apparatus including an input port connected to the microwave source;
- first and second chambers configured to process a wafer by using the microwaves;
- a first filter configured to transfer the microwaves to or cut off the microwaves from the first chamber, and connected to a first output port of the branch apparatus;
- and
- a second filter configured to transfer the microwaves to or cut off the microwaves from the second chamber, and connected to a second output port of the branch apparatus.
A microwave providing apparatus comprising:
- a microwave source configured to generate microwaves;
- a first branch apparatus connected to the microwave source, and configured to split the microwaves;
- second and third branch apparatuses connected to the first branch apparatus, and configured to split the microwaves transferred from the first branch apparatus;
- a first filter connected to a first output port of the second branch apparatus, and configured to transfer the microwaves to or cut off the microwaves from a first chamber configured to process a first wafer;
- a second filter connected to a second output port of the second branch apparatus, and configured to transfer the microwaves to or cut off the microwaves from a second chamber configured to process a second wafer;
- a third filter connected to a third output port of the third branch apparatus, and configured to transfer the microwaves to or cut off the microwaves from a third chamber configured to process a third wafer;
- a fourth filter connected to a fourth output port of the third branch apparatus, and configured to transfer the microwaves to or cut off the microwaves from a fourth chamber configured to process a fourth wafer;
- and
- a controller configured to independently control each of the first to fourth filters to allow or block microwave transmission based on process timing or frequency,
- wherein at a given time, only one of the first to fourth filters is in a passing state and the others are in a cutoff state.
Dependencies are inferred from the claim text.