Resonator device
AssigneeSeiko Epson Corporation
InventorsRyuta Nishizawa, Junichi Takeuchi
Life of this patent
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Abstract
A resonator device includes: a resonator element; a heat generating unit; a first package including a first base at which the resonator element and the heat generating unit are disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base; and a low emissivity layer that is disposed at an inner surface of the first lid and that has an emissivity lower than an emissivity of the first lid. In addition, a constituent material of the first lid is silicon, and the emissivity of the low emissivity layer at room temperature is less than 0.5.
Claims16
A resonator device comprising:
- a resonator element;
- a heat generating unit;
- a first package including a first base at which the resonator element and the heat generating unit are disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base;
- and
- a low emissivity layer that is disposed at an inner surface of the first lid and that has an emissivity lower than an emissivity of the first lid.
A resonator device comprising:
- a resonator element;
- a heat generating unit;
- a first package including a first base at which the resonator element is disposed, and a first lid bonded to the first base so as to accommodate the resonator element between the first lid and the first base;
- a second package including a second base at which the first package is disposed, and a second lid bonded to the second base so as to accommodate the first package and the heat generating unit between the second lid and the second base;
- and
- a first low emissivity layer that is disposed at an inner surface of the second lid and that has an emissivity lower than an emissivity of the second lid.
Dependencies are inferred from the claim text.