Power generator with partial sinusoidal waveform, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same

A plasma processing apparatus comprising:

• a chamber;
• a substrate stage configured to support a substrate within the chamber, and including a lower electrode;
• an upper electrode over the lower electrode to face the substrate;
• a sinusoidal power generator configured to apply a plasma power to the upper electrode to form plasma within the chamber, the plasma power having a sinusoidal voltage waveform;
• and
• a power generator for generating a partial sinusoidal waveform and configured to apply a bias power to the lower electrode,
• wherein the power generator includes:
• a resonance module circuit including a plurality of resonance control switches, and configured to generate a first output voltage by selectively turning on and off the plurality of resonance control switches based on a plurality of resonance control signals;
• and
• a pulse module circuit including a plurality of pulse control switches, and configured to generate a second output voltage by selectively turning on and off the plurality of pulse control switches based on a plurality of pulse control signals,
• wherein the power generator is configured to generate the bias power based on the first output voltage and the second output voltage,
• wherein the bias power has an overall periodic non-sinusoidal voltage waveform and a sinusoidal voltage waveform during a partial time interval of each period of the non-sinusoidal voltage waveform,
• wherein each period of the non-sinusoidal voltage waveform has a ramp interval in which the bias power has the sinusoidal voltage waveform and a pulse interval in which the bias power has a fixed voltage level that is fixed for a period of time, and
• wherein in the ramp interval, the bias power has a variable voltage level that is equal to or lower than a reference voltage level and decreases according to the sinusoidal voltage waveform, and in the pulse interval the bias power has the fixed voltage level that is higher than the reference voltage level, and each period of the non-sinusoidal voltage waveform further includes a first transition interval for changing the ramp interval to the pulse interval, and a second transition interval for changing the pulse interval to the ramp interval.

A power generator for generating a partial sinusoidal waveform, comprising:

• a resonance module circuit including a first resonance control switch, an inductor, a second resonance control switch and a capacitor, and configured to generate a first output voltage by selectively turning on and off the first resonance control switch and the second resonance control switch based on a first resonance control signal and a second resonance control signal, respectively, the first resonance control switch, the inductor and the second resonance control switch being connected between a first node and an output node, the capacitor being connected to the inductor;
• a pulse module circuit including a first pulse control switch and a second pulse control switch that are connected to the output node, and configured to generate a second output voltage by selectively turning on and off the first pulse control switch and the second pulse control switch based on a first pulse control signal and a second pulse control signal, respectively;
• and
• a control signal generator configured to generate the first resonance control signal, the second resonance control signal, the first pulse control signal and the second pulse control signal,
• wherein the power generator is configured to generate a bias power based on the first output voltage, and the second output voltage,
• wherein the bias power has a non-sinusoidal voltage waveform during an entire time interval and a sinusoidal voltage waveform during a partial time interval of the entire time interval,
• wherein the bias power has a voltage waveform that repeats every period, and
• wherein the period includes a ramp interval in which the bias power has a variable voltage level that is equal to or lower than a reference voltage level and decreases according to the sinusoidal voltage waveform, a pulse interval in which the bias power has a fixed voltage level that is higher than the reference voltage level, a first transition interval for changing the ramp interval to the pulse interval, and a second transition interval for changing the pulse interval to the ramp interval.